Rectangular RF ion source

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Rectangular RF ion source

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IBDTEC Tianxuan RISE series

Rectangular RF ion source

The new high-end RF ion source independently developed by IBDTEC adopts a unique design of a hollow cathode neutralizer to achieve ultra long continuous operation. It completely eliminates the problem of short working time of traditional hot cathodes. It utilizes multi-layer grid to achieve precise ion beam direction. It also supports independent control of ion beam current and energy for more precise control. Additionally, it has good working gas compatibility with no working gas constraints. The rectangular structure has the characteristic of large continuous coverage, which can meet the needs of continuous production.

Direction of application:

Medium to large-sized substrates

Ion beam cleaning

Ion beam etching

Ion beam assisted deposition

Product features technical parameter application area

Product consulting

Product features

>200 hours

No filament neutralization, long-term continuous operation, easy maintenance

01
60x300mm,60x900mm

Rectangular, fully independently developed process special grid, with large-area processing capacity

02
Large ion energy beam with high collimation

RF drive, grid, stable and efficient

03
Compatible with multiple working gases

Supports oxygen, nitrogen, and hydrogen (other inert gases)

04
High process repeatability

Special water cooling and high plasma uniformity

05
Accurate and flexible control

Fully independently developed power drive and control system

06