Focused DC ion source

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Focused DC ion source

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IBDTEC Tianxuan DISE series

The special DC ion source independently developed by IBDTEC Optoelectronics can be equipped with a multi-layer grid with an aperture of 15mm/30mm/60mm. It can emit converging ion beams, with an ion energy range of 50-1500eV and an ion beam current range of 30-300mA. It uses a patented hollow cathode structure and consumables, with low heat generation and continuous use time of over 100 hours. It supports a movable structure and can be used for ion beam cleaning, ion beam assistance, ion beam etching, ion beam shaping and polishing.

Direction of application:

Ion beam shaping and polishing

Ion beam cleaning

Ion beam etching

Ion beam sputtering

Video introduction

Product features technical parameter application area

Product consulting

Product features

Sub-nanometer surface modification

01
High energy

02
High reliability

03
No filament/less pollution

04
Low operating costs

05
Support for movable structures

06

Product advantages

Non-contact sub-nanometer level polishing and repair

Full process normal tracking, precise removal, faster surface convergence

High precision surface correction, RMS up to 1/200 λ

Capable of achieving high-precision polishing capability with surface RMS<3nm
Three- or five-axis control system

The shapes of processed optical components include: flat, spherical, aspherical, freeform surface, off-axis aspherical, etc.

Angle compensation function

The materials used for processing optical components include quartz glass, microcrystals, ultra-low expansion glass (ULE), KDP crystals, sapphire, silicon, silicon carbide, infrared materials, etc.