RF ion source

Consult now

In order to better meet your pursuit of product quality;

You can fill in the consulting service you want, our company will have a professional engineer to contact you.

Phone：

13318278059

E-mail：

Market@ibdtec.cn

Apply now

首页

Products

RF ion source

Return to previous page

IBDTEC Tianxuan RISE series

The new high-end ion source system independently developed by IBDTEC adopts a unique design and patented neutralizer, completely breaking away from the traditional hot cathode principle. It has a long continuous working time and uses a multi-layer three-dimensional grid to ensure accurate ion beam directionality. It supports independent control of ion beam current and energy, and has no requirements for the working gas environment. It is comparable to international advanced levels, achieving domestic substitution.

Direction of application:

Assisted deposition

Ion beam etching

Ion beam cleaning

Ion beam sputtering

Video introduction

Product features technical parameter Process application performance application area

Product consulting

Product features

High ion beam energy

01
Accurate and controllable ion beam current

02
Low thermal radiation

03
Long continuous working hours

04
Compatible with multiple working gases

05
No pollution to the membrane layer

06

Product advantages

Fully independent R&D and manufacturing, non assembly integration

Unique multi-layer grid processing technology, supporting a variety of different shapes and sizes

Radio frequency power supply and controller are independently developed and controllable to ensure optimal performance
Adaptive matching, one click ultra-fast start and ultra-high matching efficiency

Fully independently developed ion beam simulation software and ion beam precise measurement system

Multi-scenario and multi-domain process validation with excellent performance indicators