Hollow cathode Hall ion source

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Hollow cathode Hall ion source

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IBDTEC Tianxuan HIT series

A newly independently developed high-end ion source that uses a patented hollow cathode structure and consumables, breaking through the traditional 10-hour intelligent working limit of a filament Hall ion source. The continuous working time is greatly increased to over 100 hours, with low heat generation, adaptability to various gas environments, and no pollution. It can greatly improve the stability, adhesion, and density of the film layer.

Direction of application:

Assisted deposition

Low-temperature cold plating

Ion beam cleaning

Ion activation

Video introduction

Product features Product Comparison technical parameter Process application performance application area

Product consulting

Product features

Special alloy materials

"Electronic Cloud" neutrality structure

01
Low thermal radiation

Able to achieve low-temperature cold plating process

02
No filament, less product pollution

03
Convenient maintenance

High cost-effectiveness, suitable for upgrading traditional industrial production

04
Long continuous working hours

Up to 100 hours or more, capable of achieving continuous and long processes

05
High reliability

Strong adaptability to work environment

06
Support AI intelligent algorithms

IoT module, capable of online diagnosis and operation

07
Support customization

Support personalized customization

08